THK has introduced its low-profile Type CMX
alignment stage.THK has introduced its low-profile Type CMX
alignment stage.
The new stage incorporates a patent pending X-Y module design, where four hollow modules are sandwiched between, and at each corner of, a base plate and a top table. Large through openings are included to allow complete access from the top and bottom of the stage. The use of X-Y modules enabled THK to design this 3-axis stage with only the two main plates with large openings. This results in a reduction in weight and height, even for the line's largest standard table size of 1500mm x 1500mm.
Each module contains a THK pre-loaded cross LM guide type CSR for the XY table motion, as well as a cross roller ring that couples the XY motion of each module to the top table. This allows relative rotation of the top table without any need for a rotary table.
The Type CMX alignment stage produces its simultaneous X-Y and rotary motion with positioning repeatability of ±1.01?4m and up to 301?4m parallelism when the stage's three servo motors are driven in various combinations. Minimum resolution is 0.12 1?4m and maximum carrying mass exceeds 150 kg. The Type CMX is designed for automated inspection/production of: large flat panel displays, semiconductors, screen printing, and many other applications where critical alignment motion is required from a low-profile/lightweight X-Y platform.
THK America Inc.
200 East Commerce Dr.
Schaumburg, IL 60173
800-763-5459
Fax: 847-310-1182
E-mail: chicago@thk.com